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Low OH quartz glass
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Low OH quartz glass

LowOHquartzglassismadebyPlasmaFlameprocess,whichcanproduceroundingotandbereprocessedintoquartzplate,quartzflange,quartztube,quartzrod,etc.TheadvantageisthelowOHcontent(≤8ppm),whichiswidelyusedinsemiconductoraccessorymaterials.  Impurities(ppm)productAlFeCaMgTiCuMnNiCoBKNaLiOHHP3003-SS-B2.110.920.940.110.430.070.1———0.950.580.41≤8HP3003-AS-B12.140.200.400.051.200.020.42——0.100.600.800.40≤8HP3003-HK-B17.430.860.590.051.100.150.020.030.04—0.380.742.30≤8
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  Low OH quartz glass is made by Plasma Flame process, which can produce round ingot and be reprocessed into quartz plate, quartz flange, quartz tube, quartz rod, etc. The advantage is the low OH content (≤8ppm), which is widely used in semiconductor accessory materials.

 

Low OH quartz glass

 

Impurities(ppm)

product

Al

Fe

Ca

Mg

Ti

Cu

Mn

Ni

Co

B

K

Na

Li

OH

HP3003-SS-B

2.11

0.92

0.94

0.11

0.43

0.07

0.1

0.95

0.58

0.41

≤8

HP3003-AS-B

12.14

0.20

0.40

0.05

1.20

0.02

0.42

0.10

0.60

0.80

0.40

≤8

HP3003-HK-B

17.43

0.86

0.59

0.05

1.10

0.15

0.02

0.03

0.04

0.38

0.74

2.30

≤8

 

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