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High purity opaque quartz glass
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High purity opaque quartz glass

Opaquequartztubematerialwithspecialwallthicknessisproducedusingrotationtechnology.Itcanbeusedasbakingfurnacepipeandheatinsulationmaterialorusingflamefusionmethodtoproduceopaquequartzglass,thenbeprocessedintoquartzplate.Ithasgoodheatinsulationandtemperatureresistanceproperty.Itismainlyusedinheatinsulationpartsinsemiconductorprocessing. Impurities(ppm)productAlFeCaMgCuKNaLiHPR3004A25.000.50.80.10.11.62.20.3HPR3004B45.01.01.50.750.152.55.01.5 Transmission(T4mm)wavelength400nm500nm600nm700nmHPR30041.0%1.2%1.2%1.2% PhysicalandmechanicalpropertiesPropertyHPR3004Density1.95x103kg/m3CompressionStrength1.0x109Pa(N/m2)CoefficientofThermalExpansion5.4x10-7/℃ThermalConductivity1.24W/℃•mSpecificHeat650J/kg℃Softeningpoint1600℃Annealingpoint1100℃
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Product description
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  Opaque quartz tube material with special wall thickness is produced using rotation technology. It can be used as baking furnace pipe and heat insulation material or using flame fusion method to produce opaque quartz glass, then be processed into quartz plate. It has good heat insulation and temperature resistance property. It is mainly used in heat insulation parts in semiconductor processing.

 

Impurities(ppm)

product

Al

Fe

Ca

Mg

Cu

K

Na

Li

HPR3004A

25.00

0.5

0.8

0.1

0.1

1.6

2.2

0.3

HPR3004B

45.0

1.0

1.5

0.75

0.15

2.5

5.0

1.5

 

Transmission(T4mm)

wavelength

400nm

500nm

600nm

700nm

HPR3004

1.0%

1.2%

1.2%

1.2%

 

Physical and mechanical properties

Property

HPR3004

Density

1.95x103kg/m3

Compression Strength

1.0x109Pa(N/m2)

Coefficient of Thermal Expansion

5.4x10-7/℃

Thermal Conductivity

1.24W/℃•m

Specific Heat

650J/kg℃

Softening point

1600℃

Annealing point

1100℃

 

Keyword:
high
heat
it
insulation
1.2
and
quartz
thermal
using
in
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