Purity of quartz glass
Published time:
2021-09-29
Purity is a crucial indicator for quartz glass, significantly impacting its physical, chemical, and performance properties, such as devitrification, high-temperature strength, softening point, light transmission, thermal stability, chemical stability, radiation resistance, and fluorescence characteristics. Furthermore, quartz glass used in the semiconductor industry demands even higher purity; trace impurities severely affect the electrical performance, lifespan, and integration level of semiconductor materials. Since the purity requirements for semiconductor materials are controlled below the ppb level, the purity of quartz glass should be controlled at the ppm level to meet the needs of the semiconductor industry. The segregation coefficient of B is close to 1, making it the most difficult to remove and one of the most harmful impurities. Cu, Fe, and Ti affect the minority carrier lifetime of semiconductors, while K, Na, and Li are harmful impurities that cause micro-defects in single-crystal materials.
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